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Laboratory and Semiconductor

Ultra-Pure Water. Cleanroom-Compatible Process Air.

When parts per billion matter, ozone delivers high-purity treatment without introducing carriers, surfactants, or particulate. It does the work and leaves nothing behind.

Used by labs and fabrication facilities where contamination tolerances are measured in parts per billion or trillion.

Sub-ppb purity No residual chemistry
The problem

The cleaner your tolerances, the worse traditional chemistry looks.

Cleanrooms, analytical labs, and semiconductor fabrication operations need water and air at purity standards most facilities never approach. Surfactants, carrier solvents, and particulate from conventional cleaning chemistry are themselves the contamination.

Ozone delivers a strong oxidant with no carrier, no surfactant, and no residual ions. After it does its work, it is just oxygen.

Purity

Sub-ppb targets

Polishes water and surfaces to purity targets that regulated chemistries struggle to meet without introducing their own background.

Process fit

Integrates with UV and DI

Combines well with UV polishing and deionization in established ultra-pure water trains.

What ozone delivers

Cleaner inputs. Tighter tolerances.

Ultra-pure water polishing

Reduces total organic carbon to levels demanded by analytical and fabrication processes.

Wafer surface cleaning

Supports established wafer cleaning chemistries with high-concentration dissolved ozone water.

Process air treatment

Improves cleanroom and lab process air purity with no introduced contaminants.

Zero residual

No background ions, no organic carryover, no contribution to your lab blank.

Where it fits

Three high-purity environments using ozone

Fab

Semiconductor wafer cleaning

Supports established cleaning chemistries with dissolved ozone water at the rinse and clean stages.

Lab

Analytical laboratories

Polish ultra-pure water systems and reduce TOC backgrounds in trace analysis.

Pharma

Pharmaceutical and biotech

Sanitize purified and water-for-injection loops with no residual chemistry to flush.

Get a sized lab or fab solution.

Tell us about your purity targets, your existing UPW or cleanroom system, and your throughput. We will reply with a sized ozone configuration that fits the train.

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